Mechanisms of stress generation during bombardment of Ge with keV ions: experiments and molecular dynamics simulations
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference36 articles.
1. Roughness Evolution of Ion Sputtered Rotating InP Surfaces: Pattern Formation and Scaling Laws
2. Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering
3. Ion-irradiation-induced stresses and swelling in amorphous Ge thin films
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1. Swelling as a stabilizing mechanism in irradiated thin films: II. Effect of swelling rate;Journal of Physics: Condensed Matter;2022-06-15
2. Ion Beam-Assisted Deposition;Low-Energy Ion Irradiation of Materials;2022
3. Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models;Journal of Applied Physics;2016-05-21
4. Model for roughening and ripple instability due to ion-induced mass redistribution [Addendum to H. Hofsäss, Appl. Phys. A 114 (2014) 401, “Surface instability and pattern formation by ion-induced erosion and mass redistribution”];Applied Physics A;2015-02-08
5. From holes to sponge at irradiated Ge surfaces with increasing ion energy—an effect of defect kinetics?;Applied Physics A;2013-08-14
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