Control of electron energy distribution by adding a pulse inductive field in capacitive discharge
Author:
Funder
Research Foundation of Korea grant funded by the Korea government
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/23/i=6/a=062002/pdf
Reference38 articles.
1. Ion‐ and electron‐assisted gas‐surface chemistry—An important effect in plasma etching
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5. Driving frequency effect on electron heating mode transition in capacitive discharge
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