Particle nucleation and growth in a low-pressure argon-silane discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference25 articles.
1. In situ laser diagnostic studies of plasma‐generated particulate contamination
2. Particle Distributions and Laser-Particle Interactions in an RF Discharge of Silane
3. Effects of low‐frequency modulation on rf discharge chemical vapor deposition
4. Particle generation and behavior in a silane‐argon low‐pressure discharge under continuous or pulsed radio‐frequency excitation
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