Investigation and optimization of the magnetic field configuration in high-power impulse magnetron sputtering
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/22/i=4/a=045012/pdf
Reference32 articles.
1. Magnetron sputtering: a review of recent developments and applications
2. Ionized physical vapor deposition (IPVD): A review of technology and applications
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