Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering-Reference-Cited by-同舟云学术

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Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering

Published:2023-11-17 Issue:1 Volume:44 Page:601-619
ISSN:0272-4324
Container-title:Plasma Chemistry and Plasma Processing
language:en
Short-container-title:Plasma Chem Plasma Process

Author:

Fu Yuwei,Ji Peng,He Mengsha,Huang Peijun,Huang Guobin,Huang Weihua

Funder

China Postdoctoral Science Foundation

Natural Science Basic Research Program of Shaanxi Province

Young Elite Scientists Sponsorship Program

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry

Link

https://link.springer.com/content/pdf/10.1007/s11090-023-10425-9.pdf

Reference39 articles.

1. Panepinto A, Snyders R (2020) Recent advances in the development of nano-sculpted films by magnetron sputtering for energy-related applications. Nanomaterials 10(10):2039

2. Akhtar M, Uzair SA, Rizwan M et al (2022) The improvement in surface properties of metallic implant via magnetron sputtering: recent progress and remaining challenges. Front Mater 8:747169. https://doi.org/10.3389/fmats

3. Yushkov YG, Oks EM, Tyunkov AV et al (2022) Electron-beam synthesis of dielectric coatings using forevacuum plasma electron sources. Coatings 12(1):82

4. Moskovkin P, Maszl C, Schierholz R et al (2021) Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering. Surf Coat Technol 418:127235

5. Rebholz C, Ziegele H, Leyland A et al (1999) Structure, mechanical and tribological properties of nitrogen-containing chromium coatings prepared by reactive magnetron sputtering. Surf Coat Technol 115(2–3):222–229

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