2D fluid model analysis for the effect of 3D gas flow on a capacitively coupled plasma deposition reactor
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Published:2016-04-06
Issue:3
Volume:25
Page:035006
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Kim Ho Jun,Lee Hae June
Subject
Condensed Matter Physics
Cited by
27 articles.
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