Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3using a Monte Carlo‐fluid hybrid model-Reference-Cited by-同舟云学术

Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3using a Monte Carlo‐fluid hybrid model

Published:1992-02-15 Issue:4 Volume:71 Page:1654-1673
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Sommerer Timothy J.,Kushner Mark J.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.351196

Reference67 articles.

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3. A collection of papers on the modeling of collisional low-temperature plasmas can be found in a Special Issue section of IEEE Trans. Plasma Sci.PS-19(1991).ITPSBD0093-3813

4. Ion and neutral temperatures in electron cyclotron resonance plasma reactors

5. Ion and neutral temperatures in electron cyclotron resonance plasma reactors

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