Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy-Reference-Cited by-同舟云学术

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Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy

Published:2015-11-25 Issue:6 Volume:24 Page:065022
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Vašina P,Fekete M,Hnilica J,Klein P,Dosoudilová L,Dvořák P,Navrátil Z

Funder

The Czech Science Foundation in frame of the project

European Regional Development Fund and the project

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference56 articles.

1. VII. On the electro-chemical polarity of gases

2. Magnetron sputtering: a review of recent developments and applications

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4. Temporal studies of titanium ionised density fraction in reactive HiPIMS with nitrogen admixture;Plasma Sources Science and Technology;2021-12-01

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