Influence of surface conditions on plasma dynamics and electron heating in a radio-frequency driven capacitively coupled oxygen plasma
Author:
Funder
Engineering and Physical Sciences Research Council
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/24/i=4/a=044003/pdf
Reference63 articles.
1. Effect of O2(a1Δg) on plasma structures in oxygen radio frequency discharges
2. Atomic oxygen surface loss coefficient measurements in a capacitive/inductive radio-frequency plasma
3. Global (volume-averaged) model of inductively coupled chlorine plasma: Influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas
4. The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges
5. Secondary electron induced asymmetry in capacitively coupled plasmas
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