Atomic oxygen surface loss coefficient measurements in a capacitive/inductive radio-frequency plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1490630
Reference20 articles.
1. Kinetics of photoresist etching in an electron cyclotron resonance plasma
2. Surface modification of polypropylene under argon and oxygen-RF-plasma conditions
3. Global Model of Plasma Chemistry in a High Density Oxygen Discharge
4. A simple formula for diffusion calculations involving wall reflection and low density
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