On the influence of Coulomb collisions on the electron energy distribution function of surface wave produced argon plasmas
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/25/i=4/a=010/pdf
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1. Properties and applications of surface wave produced plasmas
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4. Using surface wave produced plasmas to determine the frequency effect upon etching of polyimide in RF and microwave sustained plasmas
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