On the influence of Coulomb collisions on the electron energy distribution function of surface wave produced argon plasmas
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/25/i=4/a=010/pdf
Reference31 articles.
1. Properties and applications of surface wave produced plasmas
2. A high‐frequency surface wave pumped He‐Ne laser
3. Comparison of microwave and lower frequency discharges for plasma polymerization
4. Using surface wave produced plasmas to determine the frequency effect upon etching of polyimide in RF and microwave sustained plasmas
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