Simple modelling of the E–H mode transition and hysteresis in low pressure argon ICP discharges for direct comparison with experiments
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. On the E - H mode transition in RF inductive discharges
2. Power transfer and mode transitions in low-frequency inductively coupled plasmas
3. Mode transitions and hysteresis in inductively coupled plasmas
4. Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system
5. Hysteresis and the E-to-H transition in radiofrequency inductive discharges
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1. Fast simulation of the E–H mode transition in Ar/O2 inductively coupled plasmas;Journal of Applied Physics;2023-07-18
2. Simulation and validation of the effective power absorbed by a non-equilibrium plasma flow inside the medium-power inductively coupled plasma wind tunnel;Physics of Fluids;2023-03-01
3. Effect of electron energy distributions on the electron density in nitrogen inductively coupled plasmas;Plasma Sources Science and Technology;2022-10-01
4. Experimental investigation on the hysteresis in low-pressure inductively coupled neon discharge;Physics of Plasmas;2022-09
5. Effect of RF bias power on discharge mode transition and its hysteresis in inductively coupled plasmas;Physics of Plasmas;2022-01
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