Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2844885
Reference10 articles.
1. On the E - H mode transition in RF inductive discharges
2. Hysteresis in the E- to H-mode transition in a planar coil, inductively coupled rf argon discharge
3. Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis
4. Power transfer and mode transitions in low-frequency inductively coupled plasmas
5. Optical computerized tomography of the E-H transition in inductively coupled plasmas in Ar and Ar-CF4mixtures
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