Micro-arcing in radio frequency plasmas-Reference-Cited by-同舟云学术

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Micro-arcing in radio frequency plasmas

Published:2004-09-30 Issue:20 Volume:37 Page:2871-2875
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Yin Y,Bilek M M M,McKenzie D R,Boswell R W,Charles C

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/37/i=20/a=014/pdf

Reference21 articles.

1. The Initiation of Electrical Breakdown in Vacuum

2. Recent aspects concerning DC reactive magnetron sputtering of thin films: a review

3. High rate sputtering techniques

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