Mass spectra of Au-Si alloy liquid metal ion sources
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/20/i=11/a=009/pdf
Reference27 articles.
1. Fine line lithography using ion beams
2. The gold-silicon phase diagram
3. Emission Characteristics of Au-Si-Be LM Ion Source
4. A compilation of mass spectra from liquid metal sources
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3. Microstructural changes in silicon induced by patterning with focused ion beams of Ga, Si and Au;Ultramicroscopy;2013-04
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