Emission Characteristics of Au-Si-Be LM Ion Source
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Emission characteristics of Au[sub 60]Be[sub 40] and Au[sub 62]Si[sub 23]Be[sub 15] liquid metal ion sources;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007
2. Development of a 200 kV FIB system for non destructive three-dimensional near surface analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-03
3. Design of a compact nuclear microprobe system with a liquid metal ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-05
4. Design of a 200 kV FIB system with a liquid metal ion source for IC process inspection;Microelectronic Engineering;1993-04
5. Design of a 200 kV Focused Ion Beam Surface Analysis System;Japanese Journal of Applied Physics;1992-12-30
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