Emission characteristics of Au[sub 60]Be[sub 40] and Au[sub 62]Si[sub 23]Be[sub 15] liquid metal ion sources-Reference-Cited by-同舟云学术

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Emission characteristics of Au[sub 60]Be[sub 40] and Au[sub 62]Si[sub 23]Be[sub 15] liquid metal ion sources

Published:2007 Issue:6 Volume:25 Page:2586
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Schwind G. A.,Swanson L. W.

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources;Beilstein Journal of Nanotechnology;2020-11-18

3. Introduction to focused ion beams, ion sources, and the nano-aperture ion source;Advances in Imaging and Electron Physics Including Proceedings CPO-10;2019

4. Liquid metal alloy ion sources—An alternative for focussed ion beam technology;Applied Physics Reviews;2016-06

5. Nanostructures by Mass-Separated FIB;Lecture Notes in Nanoscale Science and Technology;2013

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