Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
12 articles.
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1. Resist materials for proton beam writing: A review;Applied Surface Science;2014-08
2. Resist evaluation for proton beam writing, Ni mold fabrication and nano-replication;Microsystem Technologies;2014-01-22
3. Improved beam spot measurements in the 2nd generation proton beam writing system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
4. Proton Beam Writing: A New 3D Nanolithographic Technique;Ion Beams in Nanoscience and Technology;2009
5. New resists for proton beam writing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-07