Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O2discharges-Reference-Cited by-同舟云学术

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Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O2discharges

Published:2013-05-17 Issue:23 Volume:46 Page:235202
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Liu Jia,Zhang Quan-Zhi,Liu Yong-Xin,Gao Fei,Wang You-Nian

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/46/i=23/a=235202/pdf

Reference37 articles.

1. Electrostatic modelling of dual frequency rf plasma discharges

2. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

3. Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices

4. Control of ion energy distribution at substrates during plasma processing

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Acceleration of particle-in-cell simulations using sparse grid algorithms. I. Application to dual frequency capacitive discharges;Physics of Plasmas;2024-07-01

2. Kinetic behavior of secondary electrons in a magnetized voltage-driven discharge using combined rf/dc sources;Physica Scripta;2024-04-11

3. Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges;Plasma Sources Science and Technology;2024-04-01

4. Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas;Plasma Sources Science and Technology;2024-02-01

5. Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge;Plasma Sources Science and Technology;2023-11-01

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