Accurate determination of film thickness by low-angle X-ray reflection
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1009-1963/9/11/007/pdf
Reference8 articles.
1. Observation of X-ray interferences on thin films of amorphous silicon
2. The growth of organic thin films on silicon substrates studied by X-ray reflectometry
3. SMALL-ANGLE X-RAY DIFFRACTION STUDY OF AMORPHOUS MULTILAYER AND SINGLE LAYER THIN FILMS
4. Exact determination of superlattice structures by small‐angle x‐ray diffraction method
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