SMALL-ANGLE X-RAY DIFFRACTION STUDY OF AMORPHOUS MULTILAYER AND SINGLE LAYER THIN FILMS

Abstract

Small-angle X-ray diffraction study of amorphous a-Si:H/(a-SiNx:H) periodical multilayer thin films and some single layer films has been undertaken. A number of satellite peaks were found in the lower side of Bragg diffraction peaks of multilayer thin films with a less number of periods. A number of diffraction peaks were also found for the small-angle diffraction of single layer films. We have presented a simple formula for calculating the X-ray diffraction intensity of multilayer and single layer films. A satisfactory explaination of experimental results was obtained. Consequently, a simple method for measuring the total thickness of both multilayer and single layer thin films has been presented.