Smoothing of microfabricated silicon features by thermal annealing in reducing or inert atmospheres
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Mathematical Physics,Atomic and Molecular Physics, and Optics
Link
http://stacks.iop.org/1402-4896/2010/i=T141/a=014017/pdf
Reference12 articles.
1. Hydrogen introduction and hydrogen‐enhanced thermal donor formation in silicon
2. Kinetics of Thermal Growth of Silicon Dioxide Films in Water Vapor-Oxygen-Argon Mixtures
3. Silicon hydride etch products from the reaction of atomic hydrogen with Si(100)
4. Hydrogen annealed silicon‐on‐insulator
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