Silicon hydride etch products from the reaction of atomic hydrogen with Si(100)
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference28 articles.
1. Reactions of atomic hydrogen with the Si(111) (7×7) surface by high resolution electron energy loss spectroscopy
2. Adsorption states and adsorption kinetics of atomic hydrogen on silicon crystal surfaces
3. Hydrogen vibrations on Si (111)
4. Mono- and dihydride phases on silicon surfaces — a comparative study by EELS and UPS
5. Adsorption of atomic hydrogen on clean cleaved silicon (111)
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