Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/23/i=3/a=035107/pdf
Reference34 articles.
1. Micromachined inclinometer with high sensitivity and very good stability
2. Thermal simulation and experimental results of a micromachined thermal inclinometer
3. Micromechanical inclinometer
4. Micromachined inertial sensors
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