High-precision frequency measurement for microresonant sensors based on improved modified multi-phase clock method-Reference-Cited by-同舟云学术

High-precision frequency measurement for microresonant sensors based on improved modified multi-phase clock method

Published:2021-01-01 Issue:1 Volume:92 Page:015004
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Li Dong¹^ORCID,Zhao Qiancheng¹,Cui Jian¹^ORCID

Affiliation:

1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, People’s Republic of China

Funder

National Key R&D Program of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0026712

Reference30 articles.

1. A high-quality resonant pressure micro sensor with through-silicon-via electrical interconnections

2. Deep coupling of star tracker and MEMS-gyro data under highly dynamic and long exposure conditions

3. Dynamic force balancing for the sense mode of a silicon microgyroscope

4. Micromachined piezoresistive inclinometer with oscillator-based integrated interface circuit and temperature readout

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