Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer
Author:
Funder
Department of Science and Technology, Ministry of Science and Technology, India
Ministère de l’Enseignement Supérieur et de la Recherche Scientifique
Publisher
Elsevier BV
Subject
General Engineering
Reference33 articles.
1. Design issues of piezoresistive MEMS accelerometer for an application specific medical diagnostic system;Biswas;IETE Tech. Rev.,2016
2. A two-chip accelerometer system for automotive applications;Shemansky;Microsyst. Technol.,1995
3. On inertial-navigation system without angular-rate sensors;Larin;Int. Appl. Mech.,2013
4. A bulk micromachined three-axis capacitive MEMS accelerometer on a single die;Tez;J. Microelectromech. Syst.,2015
5. Design and analysis of MEMS comb drive capacitive accelerometer for SHM and seismic applications;Kavitha;Measurement,2016
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A Comprehensive Review on Low-Cost MEMS Accelerometers for Vibration Measurement: Types, Novel Designs, Performance Evaluation, and Applications;Journal of Molecular and Engineering Materials;2024-05-25
2. 基于激光诱导石墨烯的木制惯性测量单元;ACTA PHOTONICA SINICA;2024
3. Nanoscale and microscale processing—Modeling;Reference Module in Materials Science and Materials Engineering;2023
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3