Design and processing experiments of a new miniaturized capacitive triaxial accelerometer

Author:

Puers R.,Reyntjens S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Capacitive sensors: when and how to use them;Puers;Sensors and Actuators A,1993

2. A novel 3-axis monolithic silicon accelerometer;Andersson,1995

3. Three dimensional vector accelerometer using SOI structure for high temperature;Takao,1995

4. Three axis capacitive accelerometer with uniform axial sensitivities;Mineta;J. Micromech. Microeng.,1996

5. Three axis piezoresistive accelerometer using polysilicon layer;Kwon,1997

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