Achromatic two-stage E*B mass filter for a focused ion beam column with collimated beam-Reference-Cited by-同舟云学术

Achromatic two-stage E*B mass filter for a focused ion beam column with collimated beam

Published:1993-07-01 Issue:7 Volume:4 Page:754-763
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Teichert J,Tiunov M A

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/4/i=7/a=007/pdf

Reference16 articles.

1. Focused ion beam system with high current density

2. Mass-separated microbeam system with a liquid-metal-ion source

3. Focused ion beam system with a four stage E×B mass filter

4. An achromatic mass filter employing permanent magnets for the Delft ion beam pattern generator

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