Author:
Gila Brent,Appleton Bill R.,Fridmann Joel,Mazarov Paul,Sanabia Jason E.,Bauerdick S.,Bruchhaus Lars,Mimura Ryo,Jede Ralf,McDaniel Floyd D.,Doyle Barney L.
Cited by
5 articles.
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4. Multispecies focused ion beam lithography system and its applications;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-11
5. Materials modifications using a multi-ion beam processing and lithography system;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-02