Author:
Ishitani T.,Umemura K.,Tamura H.
Cited by
20 articles.
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1. Achromatic two-stage E*B mass filter for a focused ion beam column with collimated beam;Measurement Science and Technology;1993-07-01
2. Focused ion beam technology;Semiconductor Science and Technology;1993-06-02
3. Focused ion beam technology;Vacuum;1991-01
4. Ion Lithography and Focused Ion Beam Implantation;Handbook of Vlsi Microlithography;1991
5. Focused ion beam system with a four stage E×B mass filter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02