Research on long-range grating interferometry with nanometer resolution
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference17 articles.
1. The use of x-ray interferometry to investigate the linearity of the NPL Differential Plane Mirror Optical Interferometer
2. Nanometer measurement with a dual Fabry–Perot interferometer
3. Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer
4. Optical interferometry for measurement of the geometric dimensions of industrial parts
5. High-resolution laser linear encoder with numerical error compensation
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