Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference4 articles.
1. M. Dobosz, “Application of a focused laser beam in a grating interferometer for high-resolution displacement measurements” (in this issue).
2. S. Kataoka, Y. Shibata, T. Takahashi, and H. Yamazaki, Eds.,Sensor Handbook, pp. 430–435, Baifukan, Tokyo (1986).
3. High-precision detection method for the reference position in an optical encoder
4. Formation of a Diffractional Grating by Magnetic Lithograph
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