High-Accuracy and High-Tolerance Laser Encoder With a Grating-Pyramid Configuration
Author:
Affiliation:
1. State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, China
2. Henan Key Laboratory of Intelligent Manufacturing of Mechanical Equipment, Zhengzhou University of Light Industry, Zhengzhou, China
Funder
National Natural Science Foundation of China
Natural Science Foundation of Henan Province
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10102602/10071995.pdf?arnumber=10071995
Reference32 articles.
1. Micro-encoder based on higher-order diffracted light interference
2. Electronic Interpolation Interface Based on Linear Subdivision Method for Sinusoidal Optical Encoders
3. Compensated laser encoder with symmetric and quasi-common-path heterodyne interferometry
4. Research on long-range grating interferometry with nanometer resolution
5. Determination and correction of quadrature fringe measurement errors in interferometers
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