Single-beam thermowave analysis of ion implanted and laser annealed semiconductors
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference17 articles.
1. Thermal-wave measurements of ion implanted silicon
2. Photothermal reflectance investigation of processed silicon. I. Room‐temperature study of the induced damage and of the annealing kinetics of defects in ion‐implanted wafers
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