A new general approach for solving the self-calibration problem on large area 2D ultra-precision coordinate measurement machines
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=5/a=055001/pdf
Reference11 articles.
1. Ultra-precision geometrical measurement technique based on a statistical random phase clock combined with acoustic-optical deflection
2. A large-area ultra-precision 2D geometrical measurement technique based on statistical random phase detection
3. Error estimation for lattice methods of stage self-calibration
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