Optimization of a dual-rotating-retarder polarimeter as applied to a tunable infrared Mueller-matrix scatterometer
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/24/i=5/a=055901/pdf
Reference19 articles.
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3. Description of versatile optical polarimetric scatterometer that measures all 16 elements of the Mueller matrix for reflection and transmission: application to measurements of scatter cross sections, ellipsometric parameters, optical activity, and the complex chiral parameters
4. A scatterometer for measuring the polarized bidirectional reflectance distribution function of painted surfaces in the infrared
5. Out-of-plane ellipsometry measurements of nanoparticles on surfaces for thin film coated wafer inspection
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