Trigger mechanism of PDSOI NMOS devices for ESD protection operating under elevated temperatures*

Abstract

Trigger characteristics of electrostatic discharge (ESD) protecting devices operating under various ambient temperatures ranging from 30 °C to 195 °C are investigated. The studied ESD protecting devices are the H-gate NMOS transistors fabricated witha 0.18-μm partially depleted silicon-on-insulator (PDSOI) technology. The measurements are conducted by using a transmission line pulse (TLP) test system. The different temperature-dependent trigger characteristics of grounded-gate (GGNMOS) mode and the gate-triggered (GTNMOS) mode are analyzed in detail. The underlying physical mechanisms related to the effect of temperature on the first breakdown voltage V T1 are investigated through the assist of technology computer-aided design (TCAD) simulation.