Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical vapor deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/23/8/087810/pdf
Reference28 articles.
1. High-excitation and high-resolution photoluminescence spectra of bulk AlN
2. An aluminium nitride light-emitting diode with a wavelength of 210 nanometres
3. Enhanced deep ultraviolet emission from Si-doped Al x Ga 1− x N/AlN MQWs
4. Ultraviolet semiconductor laser diodes on bulk AlN
5. MOVPE growth of high-quality AlN
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