Traceable thickness measurement of ultra-thin HfO2 films by medium-energy ion scattering spectroscopy
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Published:2020-02-12
Issue:2
Volume:57
Page:025001
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ISSN:0026-1394
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Container-title:Metrologia
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language:
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Short-container-title:Metrologia
Author:
Kim Kyung JoongORCID,
Kim Tae GunORCID,
Kwon Ji-Hwan,
Ruh Hyun,
Park Kyungsu,
Min Won Ja
Subject
General Engineering
Cited by
6 articles.
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