Author:
Kwak Gyea Young,Chang Hye Jung,Na Min Young,Ryu Seo Kyoung,Kim Tae Gun,Woo Jin Chun,Kim Kyung Joong
Funder
Ministry of Science and ICT, South Korea
National Research Council of Science and Technology
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference30 articles.
1. Metrology for the next generation of semiconductor devices;Orji;Nature Electronics,2018
2. M. Moore, International Roadmap for Devices and Systems (IRDS) 2020 update (IEEE, 2020); https://irds.ieee.org/images/files/pdf/2020/2020IRDS_MM.pdf.
3. Using CD-SEM metrology in the manufacture of semiconductors;McIntosh;JOM,1999
4. Higher order tip effects in traceable CD-AFM-based linewidth measurements;Orji;Meas. Sci. Technol.,2007
5. Large area high-speed metrology SPM system;Klapetek;Nanotechnology,2015
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