Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Instrumentation,Electronic, Optical and Magnetic Materials
Reference172 articles.
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https://irds.ieee.org/images/files/pdf/2017/2017IRDS_MET.pdf
This is the current International Roadmap for Devices and Systems (formerly ITRS) metrology roadmap, and contains information on key drivers and metrology technology requirements for integrated circuit device parameters.
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