Analysis of energy relaxation kinetics for control of the electron energy distributions in capacitively coupled RF discharges
Author:
Funder
National Research Foundation of Korea
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://iopscience.iop.org/article/10.1088/1361-6595/aab862/pdf
Reference36 articles.
1. The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges
2. Electron energy distribution function control in gas discharge plasmas
3. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
4. Measurement of electron energy distribution in low-pressure RF discharges
5. Nonlocal electron kinetics in collisional gas discharge plasmas
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2. Two-dimensional particle-in-cell simulation parallelized with graphics processing units for the investigation of plasma kinetics in a dual-frequency capacitively coupled plasma;Reviews of Modern Plasma Physics;2022-09-28
3. Two‐dimensional analysis for the transition from nonlocal to local electron kinetics and its effect on the spatial uniformity of a capacitively coupled plasma;Plasma Processes and Polymers;2022-04-08
4. The formation mechanism of nonuniformity from 2D nonlocal particle-dynamics in capacitive RF discharges;Plasma Sources Science and Technology;2021-06-10
5. Independent Variables to Control a Time-Varying Energy Distribution of Charged Species in a Capacitively Coupled Plasma;2020 IEEE International Conference on Plasma Science (ICOPS);2020-12-06
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