The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/24/i=2/a=024002/pdf
Reference63 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Plasma Electronics
3. Physics of Radio-Frequency Plasmas
4. Multiple frequency capacitively coupled plasmas as a new technology for sputter processes
5. From Fermi acceleration to collisionless discharge heating
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