Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties
-
Published:2019-02-28
Issue:2
Volume:28
Page:024002
-
ISSN:1361-6595
-
Container-title:Plasma Sources Science and Technology
-
language:
-
Short-container-title:Plasma Sources Sci. Technol.
Author:
Faraz TahsinORCID,
Arts Karsten,
Karwal Saurabh,
Knoops Harm C M,
Kessels Wilhelmus M MORCID
Subject
Condensed Matter Physics
Cited by
63 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献