Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges
Author:
Funder
National Natural Science Foundation of China
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://iopscience.iop.org/article/10.1088/1361-6595/ab17ae/pdf
Reference60 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Physics of Radio-Frequency Plasmas
3. Plasma Electronics
4. Instabilities in a capacitively coupled oxygen plasma
5. Modelling plasma discharges at high electronegativity
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