Characterization of transport of titanium neutral atoms sputtered in Ar and Ar/N2 HIPIMS discharges
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Published:2019-03-08
Issue:3
Volume:28
Page:035005
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ISSN:1361-6595
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
El Farsy AORCID,
Ledig J,
Desecures M,
Bougdira J,
de Poucques L
Subject
Condensed Matter Physics
Cited by
12 articles.
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