Experimental investigations of the magnetic asymmetry effect in capacitively coupled radio frequency plasmas
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Published:2018-10-25
Issue:10
Volume:27
Page:105018
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ISSN:1361-6595
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Oberberg MORCID,
Kallähn J,
Awakowicz P,
Schulze JORCID
Subject
Condensed Matter Physics
Cited by
37 articles.
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