Sparse data recovery of tomographic diagnostics for ultra-large-area plasmas
Author:
Funder
Samsung Display
National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://iopscience.iop.org/article/10.1088/1361-6595/ab093c/pdf
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3. Nonuniform radio-frequency plasma potential due to edge asymmetry in large-area radio-frequency reactors
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