Short-wavelength out-of-band EUV emission from Sn laser-produced plasma
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Atomic and Molecular Physics, and Optics
Link
http://iopscience.iop.org/article/10.1088/1361-6455/aaa593/pdf
Reference38 articles.
1. Extreme ultraviolet lithography: Status and prospects
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