The influence of Exciting Frequency on N 2 and N 2 + Vibrational Temperature of Nitrogen Capacitively Coupled Plasma
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/0256-307X/26/5/055202/pdf
Reference25 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Ion energy distribution control in single and dual frequency capacitive plasma sources
3. Analytic model for a dual frequency capacitive discharge
4. Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources
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1. Understanding the morphological variation in the formation of B4C via carbothermal reduction reaction;Ceramics International;2016-11
2. Analysis of electron energy distribution function in a magnetically filtered complex plasma;Chinese Physics B;2013-04
3. Abnormal Enhancement of N2+Emission Induced by Lower Frequency in N2Dual-Frequency Capacitively Coupled Plasmas;Plasma Science and Technology;2012-03
4. Investigation of Capacitively Coupled Argon Plasma Driven by Dual-Frequency with Different Frequency Configurations;Plasma Science and Technology;2011-10
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